Work

Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometry

Year: 2003

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2003.820262

Authors: A.P. Lee, C.F. McConaghy, G. Sommargren, P. Krulevitch, E.W. Campbell

Institutions: University of California, Irvine, Lawrence Livermore National Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Brain Aneurysm Foundation

OpenAlex ID: W2096287465

FWCI: 6.022

Cites: 41

Cited by: 84

Related to: 10