Work

Nanoscale mapping of in situ actuating microelectromechanical systems with AFM

Year: 2015

Type: article

Source: Journal of materials research/Pratt's guide to venture capital sources

DOI: 10.1557/jmr.2014.353

Authors: Manuel Rivas, Varun Vyas, Aliya Carter, James Veronick, Yusuf Khan, Oleg V. Kolosov, Ronald G. Polcawich, Bryan D. Huey

Institutions: University of Connecticut, UConn Health, Lancaster University, DEVCOM Army Research Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Engineering and Physical Sciences Research Council

Awards: G282287322, G4146907411, G6583864692

OpenAlex ID: W2096701385

FWCI: 0.481

Cites: 67

Cited by: 7

Related to: 10