Work

A CMOS compatible thermally excited silicon oxide beam resonator with aluminum mirror

Year: 2002

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.1991.148934

Authors: D. Moser, O. Brand, H. Baltes

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2097432777

FWCI: 2.845

Cites: 4

Cited by: 20

Related to: 10