Silicon waveguide sidewall smoothing by wet chemical oxidation
Year: 2005
Type: article
Source: Journal of Lightwave Technology
Authors: D.K. Sparacin, S.J. Spector, L.C. Kimerling
Institutions: Massachusetts Institute of Technology, MIT Lincoln Laboratory
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2097448833