Work

Thermoelastic damping in trench-refilled polysilicon resonators

Year: 2004

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2003.1215318

Authors: R. Abdolvand, G.K. Ho, A. Erbil, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2097458902

FWCI: 7.849

Cites: 12

Cited by: 33

Related to: 10