Work

Compensated aspect ratio dependent etching (CARDE) using gray-scale technology

Year: 2004

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2004.09.004

Authors: Brian Morgan, Christopher M. Waits, Reza Ghodssi

Institutions: University of Maryland, College Park, DEVCOM Army Research Laboratory

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2097461487

FWCI: 1.635

Cites: 12

Cited by: 14

Related to: 10