Work

High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology

Year: 2005

Type: conference-paper

Source: IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF)

DOI: 10.1109/smic.2004.1398189

Authors: S. Pourkamali, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2097567794

FWCI: 7.148

Cites: 8

Cited by: 28

Related to: 10