Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators
Year: 2004
Type: article
Source: Sensors and Actuators A Physical
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G3974705572
OpenAlex ID: W2097912213