Work

Characterization of low energy SIMOX (LES) structures

Year: 2002

Type: conference-paper

Source: IEEE SOS/SOI Technology Conference

DOI: 10.1109/sossoi.1990.145704

Authors: F. Namavar, E. Cortesi, N.M. Kalkhoran, J.M. Manke, B.L. Buchanan

Institution: Spire Corporation (United States)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2098068537

FWCI: 0.356

Cites:

Cited by: 4

Related to: 10