Work

Study on etch front of piezoelectric ZnO film and new step coverage technique

Year: 2002

Type: conference-paper

Source: IEEE International Ultrasonics Symposium

DOI: 10.1109/ultsym.1997.663085

Authors: Kuok Chun Lou, Xu Zhu, H. Lakdawala, Eun Sok Kim

Institution: University of Hawaiʻi at Mānoa

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2098550516

FWCI: 1.424

Cites: 3

Cited by: 7

Related to: 10