Two-dimensional impurity profiling with emission computed tomography techniques
Year: 1989
Type: article
DOI: 10.1109/43.29587
Authors: S.H. Goodwin-Johansson, R. Subrahmanyan, C.E. Floyd, H.Z. Massoud
Institutions: Duke University, MCNC Research and Development Institute
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2099571748
