Work

Quality Factor in Trench-Refilled Polysilicon Beam Resonators

Year: 2006

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2006.876662

Authors: R. Abdolvand, H. Johari, G.K. Ho, A. Erbil, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2100471439

FWCI: 5.396

Cites: 21

Cited by: 94

Related to: 10