A Thin-Film Piezoelectric Microactuator Optically Powered via an Integrated Micro-Solar Cell
Year: 2006
Type: conference-paper
Authors: Mandar Deshpande, Laxman Saggere
Institution: University of Illinois Chicago
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2100880296
