Work

Corrugated diaphragm for piezoelectric microphone

Year: 2002

Type: conference-paper

Source: IEEE International Conference on Emerging Technologies and Factory Automation (ETFA)

DOI: 10.1109/etfa.1996.573901

Authors: Hai Yan, Eun Sok Kim

Institution: University of Hawaiʻi at Mānoa

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Defense Advanced Research Projects Agency

OpenAlex ID: W2101835995

FWCI: 0.712

Cites: 14

Cited by: 11

Related to: 10