Work

Mechanism of temperature-iniduced plastic deformation of amorphous dielectric films for mems applications

Year: 2005

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2005.1453969

Authors: Zhiqiang Cao, Xin Zhang

Institution: Boston University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2102120118

FWCI: 1.649

Cites: 6

Cited by: 6

Related to: 10