Feasibility of micro power supplies for MEMS
Year: 1997
Type: article
DOI: 10.1109/84.650133
Authors: P.B. Koeneman, I.J. Busch-Vishniac, K.L. Wood
Institution: The University of Texas at Austin
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2102234682