Work

Direct microscale imprinting of Al at room temperature with Si inserts

Year: 2008

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-008-0567-6

Authors: J. Jiang, Fanghua Mei, W. J. Meng, G. B. Sinclair, Sunggook Park

Institution: Louisiana State University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2102242648

FWCI: 1.768

Cites: 19

Cited by: 25

Related to: 10