Work

Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments

Year: 2000

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(99)00337-4

Authors: Roya Maboudian, W.Robert Ashurst, Carlo Carraro

Institution: University of California, Berkeley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Arnold and Mabel Beckman Foundation, Sandia National Laboratories

OpenAlex ID: W2102374119

FWCI: 17.08

Cites: 19

Cited by: 381

Related to: 10