Work

Microball-bearing-supported electrostatic micromachines with polymer dielectric films for electromechanical power conversion

Year: 2006

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/16/9/s03

Authors: A Modafe, N Ghalichechian, A Frey, J H Lang, R Ghodssi

Institutions: University of Maryland, College Park, Massachusetts Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2102495510

FWCI: 4.72

Cites: 32

Cited by: 34

Related to: 10