Work

Very High Frequency Silicon Nanowire Electromechanical Resonators

Year: 2007

Type: article

Source: Nano Letters

DOI: 10.1021/nl0706695

Authors: X. L. Feng, Rongrui He, Peidong Yang, M. L. Roukes

Institutions: California Institute of Technology, Lawrence Berkeley National Laboratory, Kavli Nanoscience Institute, University of California, Berkeley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2103114895

FWCI: 25.86

Cites: 28

Cited by: 412

Related to: 9