Work

CMOS MEMS - present and future

Year: 2003

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2002.984302

Authors: H. Baltes, O. Brand, A. Hierlemann, D. Lange, C. Hagleitner

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2103934835

FWCI: 7.35

Cites: 50

Cited by: 87

Related to: 10