Work

Mid-infrared thermomechanical sensitivity of microcantilevers for application to infrared spectroscopy

Year: 2010

Type: conference-paper

Source: Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ...

DOI: 10.1109/icsens.2010.5691004

Authors: Beomjin Kwon, William P King, Matthew Schulmerich, Rohit Bhargava

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2103940296

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Cites: 16

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Related to: 10