Work

Low-voltage large-value tunable capacitors using selfaligned HARPSS

Year: 2008

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2008.4443657

Authors: M. Rais-Zadeh, A. K. Samarao, P. Monajemi, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2105004022

FWCI: 0.474

Cites: 5

Cited by: 3

Related to: 10