Work

Design, fabrication, and testing of a piezoelectrically driven high flow rate micro-pump

Year: 2002

Type: conference-paper

Source: IEEE International Symposium on Applications of Ferroelectrics (ISAF)

DOI: 10.1109/isaf.2000.941559

Authors: L. Saggere, N.W. Hagood, D.C. Roberts, H.-Q. Li, J.L. Steyn, K. Turner, J.A. Carretero, O. Yaglioglu, Y.-H. Su, R. Mlcak, S.M. Spearing, K.S. Breuer, M.A. Schmidt

Institutions: Massachusetts Institute of Technology, Brown University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Defense Advanced Research Projects Agency, Office of Naval Research

OpenAlex ID: W2105063378

FWCI: 2.489

Cites: 4

Cited by: 20

Related to: 10