Work

Computer-aided recipe generation for LPCVD reactors

Year: 2002

Type: conference-paper

Source: ASMC proceedings

DOI: 10.1109/asmc.1990.111209

Authors: K.-K. Lin, C.J. Spanos

Institution: University of California, Berkeley

Language: English

Topic: Optimal Experimental Design Methods

Subfield: Management Science and Operations Research

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W2105486458

FWCI:

Cites: 4

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Related to: 10