Work

A mode-matched 0.9 MHZ single proof-mass dual-axis gyroscope

Year: 2011

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2011.5969229

Authors: W.K. Sung, M. Dalal, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2105810303

FWCI: 6.944

Cites: 4

Cited by: 43

Related to: 10