Work

A high sensitivity z-axis torsional silicon accelerometer

Year: 2002

Type: conference-paper

Source: Technical digest - International Electron Devices Meeting/Technical digest

DOI: 10.1109/iedm.1996.554092

Authors: A. Selvakumar, F. Ayazi, K. Najafi

Institution: University of Michigan

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Advanced Research Projects Agency

OpenAlex ID: W2106034437

FWCI: 1.778

Cites: 9

Cited by: 20

Related to: 10