Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon
Year: 2006
Type: article
Authors: J. Kim, H. Choo, L. Lin, R.S. Muller
Institutions: Yonsei University, University of California, Berkeley
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2106930917