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Product relevant device leakage scribe characterization vehicle test chip for efficient full wafer testing

Year: 2011

Type: conference-paper

Source: IEEE International Conference on Microelectronic Test Structures (ICMTS)

DOI: 10.1109/icmts.2011.5976857

Authors: Christopher Hess, Robert Firu, Rakesh Vallishayee, Shia Yu, Peng Zhao, Sa Zhao

Institution: PDF Solutions (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: U.S. Department of Energy

OpenAlex ID: W2107387316

FWCI:

Cites: 6

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Related to: 10