Plow and Ridge Nanofabrication
Year: 2013
Type: article
Abstract: Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.
Source: Small
Institutions: Northwestern University, Nanyang Technological University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
Funder: National Cancer Institute
Award: G1745892387
OpenAlex ID: W2107582901