Work

Improved micro-optoelectromechanical systems deformable mirror for in vivo optical microscopy

Year: 2012

Type: article

Abstract: Micro-optoelectromechanical systems (MOEMS) deformable mirrors are being developed for focus control in miniature optical systems including endoscopic microscopes and small form-factor camera lenses. A new process is described to create membrane mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration, are described. Multiple actuation electrodes allow active control of more than 1.4 μm peak-to-peak of wavefront spherical aberration. The MOEMS mirror is demonstrated in a confocal microscope in which it provides focus control during capture of in vivo images.

Source: Journal of Micro/Nanopatterning Materials and Metrology

DOI: 10.1117/1.jmm.11.4.043006

Authors: Mohammad J. Moghimi, Chris R. Wilson, David L. Dickensheets

Institutions: Montana State University, Bridger Photonics (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: National Science Foundation, Montana State University, Montana Board of Research and Commercialization Technology

Awards: STTR Phase II: Compact Aberration Compensated Focus and Scan Control for Biomedical Sensors, G3313551727, IDBR: Agile Electronic Focus and Aberration Control for Live Animal Microscopy