Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers
Year: 2007
Type: conference-paper
Authors: Siavash Pourkamali, Farrokh Ayazi
Institutions: Georgia Institute of Technology, University of Denver
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2107844428