Work

MEMS composite structures for tunable capacitors and IC-package nano interconnects

Year: 2004

Type: conference-paper

Source: IEEE Electronic Components and Technology Conference (ECTC)

DOI: 10.1109/ectc.2004.1319434

Authors: A.O. Aggarwal, K. Naeli, P.M. Raj, F. Ayazi, S. Bhattacharya, R.R. Tummala

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2108846278

FWCI: 1.652

Cites: 14

Cited by: 6

Related to: 10