Work

Etch rates for micromachining processing

Year: 1996

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/84.546406

Authors: K.R. Williams, R.S. Muller

Institution: University of California, Berkeley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2110070104

FWCI: 6.991

Cites: 66

Cited by: 672

Related to: 10