Work

Flexible parylene actuator for micro adaptive flow control

Year: 2002

Type: conference-paper

DOI: 10.1109/memsys.2001.906591

Authors: T.N. Pornsin-Sirirak, Y.C. Tai, H. Nassef, C.M. Ho

Institutions: California Institute of Technology, University of California, Los Angeles

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2110115083

FWCI: 4.983

Cites: 4

Cited by: 23

Related to: 10