Effect of Hydrofluoric Acid in Oxidizing Acid Mixtures on the Hydroxylation of Silicon Surface
Year: 2007
Type: article
DOI: 10.1149/1.2779951
Institution: University of Nebraska–Lincoln
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2110245797
