Work

Air-backed Al/ZnO/Al film bulk acoustic resonator without any support layer

Year: 2003

Type: conference-paper

DOI: 10.1109/freq.2002.1075850

Authors: Hao Zhang, Eun Sok Kim

Institution: University of Southern California

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Office of Naval Research

OpenAlex ID: W2111728889

FWCI: 6.379

Cites: 5

Cited by: 18

Related to: 10