Work

Characterisation of residual stress in dielectric films studied by automated wafer mapping

Year: 2014

Type: conference-paper

Source: IEEE International Conference on Microelectronic Test Structures (ICMTS)

DOI: 10.1109/icmts.2014.6841475

Authors: R. Walker, E. Sirotkin, G. Schiavone, J. G. Terry, S. Smith, A. R. Mount, M. P. Y. Desmulliez, A. J. Walton

Institutions: University of Edinburgh, Heriot-Watt University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Innovative electronics Manufacturing Research Centre, Engineering and Physical Sciences Research Council

OpenAlex ID: W2112659661

FWCI: 0.81

Cites: 10

Cited by: 3

Related to: 10