Year: 2013
Type: article
Abstract: Recent experimental and analytical research has shown that higher in‐fluid quality factors ( Q ) are achieved by actuating microcantilevers in the lateral flexural mode, especially for microcantilevers having larger width‐to‐length ratios. However, experimental results show that for these geometries the resonant characteristics predicted by the existing analytical models differ from the measurements. A recently developed analytical model to more accurately predict the resonant behaviour of these devices in viscous fluids is described. The model incorporates viscous fluid effects via a Stokes‐type fluid resistance assumption and ‘Timoshenko beam’ effects (shear deformation and rotatory inertia). Unlike predictions based on Euler‐Bernoulli beam theory, the new theoretical results for both resonant frequency and Q exhibit the same trends as seen in the experimental data for in‐water measurements as the beam slenderness decreases. An analytical formula for Q is also presented to explicitly illustrate how Q depends on beam geometry and on beam and fluid properties. Beam thickness effects are also examined and indicate that the analytical results yields good numerical estimates of Q for the thinner (5 μm) specimens tested, but overestimate Q for the thicker (20 μm) specimens, thus suggesting that a more accurate fluid resistance model should be introduced in the future for the latter case.
Source: Micro & Nano Letters
Authors: Joshua A. Schultz, Stephen M. Heinrich, Fabien Josse, Nicholas J. Nigro, Isabelle Dufour, Luke A. Beardslee, Oliver Brand
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
Funder: National Science Foundation
OpenAlex ID: W2113309258