Year: 2005
Type: article
Abstract: The use of copper to produce interconnects for microchip manufacture has prompted a renewed interest in its corrosion, deposition, and passivation processes. The aqueous electrochemistry of four bis(β-diketonate)copper complexes (where , tfacH, hfacH, and tmhdH) in aqueous media has been investigated. Equilibrium constants were used to calculate potential-pH diagrams, varying the β-diketone ligand, ligand and∕or copper concentrations, and the ionic strength of the buffer solution. The theoretical potential-pH diagrams showed good correlation to the experimental data obtained in aqueous solutions.
DOI: 10.1149/1.2047387
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2113582815
