Work

MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine

Year: 2007

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2007.4300334

Authors: C.M. Waits, N.R. Jankowski, B. Geil, R. Ghodssi

Institutions: DEVCOM Army Research Laboratory, University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Army Research Laboratory

OpenAlex ID: W2113679851

FWCI: 4.02

Cites: 6

Cited by: 12

Related to: 10