Linear acoustic bandgap arrays for spurious mode suppression in piezoelectric MEMS resonators
Year: 2011
Type: conference-paper
Authors: Logan Sorenson, Jenna Fu, Farrokh Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Georgia Institute of Technology
OpenAlex ID: W2113870945
