Work

Passivating CVD Molybdenum Films Against Infrared Reflection Losses Caused by Oxidation

Year: 1978

Type: article

Abstract: Thin film reflectors of molybdenum deposited by CVD can be passivated against oxidation by overcoating them with either a thin film of aluminum oxide (500Å) or silicon nitride (300Å). A set of such molybdenum films were exposed to open air at 500°C for 160 min without measurable deterioration of their infrared reflectance. This demonstrates the feasibility of using refractory metal reflectors in high temperature photothermal converters without risking reflectance losses caused by oxidation. It also established the possibility of integrating the refractory metal reflector into the deposition sequence of converter fabrication by CVD.

Source: Journal of The Electrochemical Society

DOI: 10.1149/1.2131636

Authors: G. E. Carver, H. S. Gurev, B. O. Seraphin

Institution: University of Arizona

Language: English

Topic: Thermal Radiation and Cooling Technologies

Subfield: Civil and Structural Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: National Science Foundation, Advanced Research Projects Agency, Division of Materials Research

Award: Research Initiation: Investigation of the Properties of Cathodochromic-Luminescent Materials and Crt Display Devices