Work

Nonlinear effects and anomalous transport in RF plasmas

Year: 2006

Type: article

Source: IEEE Transactions on Plasma Science

DOI: 10.1109/tps.2006.874851

Author: F.F. Chen

Institution: University of California, Los Angeles

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2114566353

FWCI: 0.328

Cites: 38

Cited by: 16

Related to: 10