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Patterning with block copolymer thin films
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Year:
2005
Type:
article
Source:
Materials Science and Engineering R Reports
DOI:
10.1016/j.mser.2004.12.003
Author:
Rachel A. Segalman
Institutions:
Lawrence Berkeley National Laboratory,
University of California, Berkeley
Language:
English
Topic:
Block Copolymer Self-Assembly
Subfield:
Materials Chemistry
Field:
Materials Science
Domain:
Physical Sciences
Open Access status:
closed
OpenAlex ID:
W2114708340
FWCI:
27.39
Cites:
237
Cited by:
967
Related to:
10