Work

A fully-dry PECVD-oxynitride process for microgc column fabricatton

Year: 2005

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2005.1454044

Authors: M. Agah, K.D. Wise

Institution: University of Michigan

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2114803627

FWCI: 2.749

Cites: 17

Cited by: 7

Related to: 10