Work

Fabrication of Sub-10 nm Planar Nanofluidic Channels Through Native Oxide Etch and Anodic Wafer Bonding

Year: 2010

Type: article

Source: IEEE Transactions on Nanotechnology

DOI: 10.1109/tnano.2009.2038377

Authors: Chunrong Song, Pingshan Wang

Institution: Clemson University

Language: English

Topic: Microfluidic and Capillary Electrophoresis Applications

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2114864426

FWCI: 1.7

Cites: 16

Cited by: 10

Related to: 10