Material Fatigue and Reliability of MEMS Accelerometers
Year: 2008
Type: conference-paper
Source: Proceedings
DOI: 10.1109/dft.2008.37
Authors: Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2115088314