Work

Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits

Year: 1996

Type: article

Source: Semiconductor Science and Technology

DOI: 10.1088/0268-1242/11/2/001

Author: Ingrid De Wolf

Institution: IMEC

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2115295828

FWCI: 18.64

Cites: 54

Cited by: 998

Related to: 10