Work

Design and fabrication of high-performance polysilicon vibrating ring gyroscope

Year: 2002

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.1998.659829

Authors: F. Ayazi, K. Najafi

Institution: University of Michigan

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2115472321

FWCI: 4.267

Cites: 10

Cited by: 77

Related to: 10